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MicroNano Machining


Ultrafast Laser (Femtosecond laser)

Make: Clark MXR, USA


  • Complex precision parts like Medical Stents, Shaver heads, Fluid channels can be machined.
  • The machining regime is in the order of about 0.5µm to 1m

Fig: Helix groove created using Ultra Fast laser inside acrylate block




Focused Ion Beam Machining

Make: Carl Zeiss Neon 40 Crossbeam, Germany


  • Complex precision parts of nanometric size.
  • TEM and EBSD sample preparation can be done.
  • The machining regime is in the order of about 50nm to 1µm

Fig: Nano gratings made on Silicon using FIB







Ball Mill

Make: Fritsch, Germany


  • Development of Nano powders from ceramics and metals
  • Powders can be used in composites

Fig: Ball Mill




Integrated Multi process Machine tool

Make: Mikro Tools, Singapore

  • Micro EDM, Micro Wire EDM, Micro Turning, Micro Milling
  • Can be used for making high aspect ratio micro flat bottom holes and other complex features

Fig: Integrated Multi process tool

Nano Metrology

Confocal Microscope

Make: Olympus LEXT 4000, Japan


  • 3D imaging

  • Surface topology


Confocal Microscope




Ultra Precision CMM

Make: Carl Zeiss F25, Germany


  • Dimensional measurements of complex micro components
  • Tactile and Optical probing system





Gauge Block Interferometer

Make: Hexagon Metrology, UK


  • Calibration of slip gauges without master
  • 20nm accuracy

Fig: GBI




Flatness Interferometer

Make: Zygo, USA


  • Calibration of optical flats
  • Measurment of radius of curvature

Fig:Flatness profile of an optical flat




Optical Profiler

Make: Veeco NT9100, USA


  • Dynamic behaviour of MEMS devices
  • Surface roughness at a nano scale
  • Study of Coating Film Thickness, Study of Wear on inserts, etc.

Silicon Beams – 400x600x13µm

Surface Engineering

Plasma Enhanced Chemical Vapour Deposition

Make: HBS 500, Roth & Rau, Germany

  • Can deposit a thin film of Carbon based materials like Carbon Nano     Tube, Diamond like Carbon, Graphene etc.
  • Coatings for Tool inserts, machine tools etc.
Plasma Enhanced Chemical Vapour Deposition System
Carbon Nano Tubes grown at CMTI                      

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by Dr. Radut.